Optical pressure sensor for an aeronautical application using white light interferometry

John Greenwood; George M. Dobre

doi:10.1117/12.397920

1 September 2000 Optical pressure sensor for an aeronautical application using white light interferometry

John Greenwood, George M. Dobre

Proceedings Volume 4075, Micro-Opto-Electro-Mechanical Systems; (2000) https://doi.org/10.1117/12.397920
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

An optical pressure sensor for measuring hydraulic pressure in an aeronautical application is described. It is based on interferometry with low-coherence light coupled with single mode fibre. The design uses an anisotropically etched silicon diaphragm, electrostatically bonded to a borosilicate glass insert, mounted in a titanium body.

Citation Download Citation

John Greenwood and George M. Dobre "Optical pressure sensor for an aeronautical application using white light interferometry", Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); https://doi.org/10.1117/12.397920

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