Compensation for the dynamic characteristics of angular rate microsensor made of quartz

Ying Wang; Yunan Sun; BingKun Qin

doi:10.1117/12.385608

9 May 2000 Compensation for the dynamic characteristics of angular rate microsensor made of quartz

Ying Wang, Yunan Sun, BingKun Qin

Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385608
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China

Abstract

Quartz tuning-fork angular rate microsensor belongs to vibratory gyroscopes, and has a very high quality factor which can obviously improve the sensitivity when the driving mode f_d is close to the sense mode f_s, however, in the same time its dynamic characteristics will be deteriorated. The relationship between the sensitivity and resonant frequencies, and the relationship between dynamic characteristics and resonant frequencies of the quartz tuning-fork gyroscopes are analyzed. An effective compensating network based on digital filter in order to improve the gyroscope's dynamic characteristics is presented in this paper.

Citation Download Citation

Ying Wang, Yunan Sun, and BingKun Qin "Compensation for the dynamic characteristics of angular rate microsensor made of quartz", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385608

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