Position and speed control sensor of microrobot

Hong-Lin Yu; Anguo He; Sheng Liu; Yan Chen

doi:10.1117/12.385626

9 May 2000 Position and speed control sensor of microrobot

Hong-Lin Yu, Anguo He, Sheng Liu, Yan Chen

Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385626
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China

Abstract

In this paper, a position and speed control sensor of microrobot is developed, the method of making high-density radial grating and a new multiple frequency method are given.

Citation Download Citation

Hong-Lin Yu, Anguo He, Sheng Liu, and Yan Chen "Position and speed control sensor of microrobot", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385626

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available