Sol-gel-derived PLZT (7/60/40) thin films on ITO/glass and LNO/glass substrates

Ping Sun; Tong Sun; Chao-Nan Xu; Tadahiko Watanabe

doi:10.1117/12.408339

29 November 2000 Sol-gel-derived PLZT (7/60/40) thin films on ITO/glass and LNO/glass substrates

Ping Sun, Tong Sun, Chao-Nan Xu, Tadahiko Watanabe

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408339
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The PLZT (7/60/40) thin films were prepared on ITO/Glass and LNO/Glass substrates by sol-gel process. The crack-free, uniform and dense films were obtained by post-annealing at the temperature between 450 degree(s)C and 600 degree(s)C. Pyrochlore phase was completely changed to perovskite phase above 570 degree(s)C with the increase of annealing temperature. The crystal buffer layer of ITO or LNO can promote the growth of perovskite. Films deposited on LNO/Glass substrates possesses good ferroelectric characteristics, P_r equals 18 (mu) C/cm², E_c equals 55 kV/cm. The asymmetrical switching characteristics can be observed for the films deposited on LNO/Glass substrates, which is mainly due to the difference between top electrode Au and bottom electrode LNO.

Citation Download Citation

Ping Sun, Tong Sun, Chao-Nan Xu, and Tadahiko Watanabe "Sol-gel-derived PLZT (7/60/40) thin films on ITO/glass and LNO/glass substrates", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408339

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