Straightness measurement of a moving table by using laser beams

Koji Tenjimbayashi

doi:10.1117/12.405228

24 October 2000 Straightness measurement of a moving table by using laser beams

Koji Tenjimbayashi

Proceedings Volume 4093, Current Developments in Lens Design and Optical Systems Engineering; (2000) https://doi.org/10.1117/12.405228
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A new method to measure the straightness of a moving table by using a laser beams is proposed. The straightness of a moving table consists of three rotation angle errors and two parallel displacement errors. The former error components are measured by two sets of parallel mirrors and the latter by a corner-cube mirror.

Citation Download Citation

Koji Tenjimbayashi "Straightness measurement of a moving table by using laser beams", Proc. SPIE 4093, Current Developments in Lens Design and Optical Systems Engineering, (24 October 2000); https://doi.org/10.1117/12.405228

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