Optical testing of long cylindrical lenses by means of scanning deflectometry

Willem D. van Amstel; Peter F.A. van de Goor; Jef L. Horijon; Peter G. J. M. Nuyens

doi:10.1117/12.405813

2 November 2000 Optical testing of long cylindrical lenses by means of scanning deflectometry

Willem D. van Amstel, Peter F.A. van de Goor, Jef L. Horijon, Peter G. J. M. Nuyens

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405813
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We present an extremely simple and powerful test set-up for measuring the position and the focal line straightness (lateral) and flatness (longitudinal) of cylindrical lenses, in particular of very long cylindrical lenses. Measurement results are presented for 330 mm and 650 mm long plano- convex cylindrical lenses with a focal length f approximately equals 48 mm, showing that a (lateral) straightness measurement accuracy of about +/- 1 micrometers is achieved easily with a set-up using not much more than a laser, a simple beam deflector from a barcode scanner, a PSD (position-sensitive photo diode) with associated electronics and a translation stage. A fully automated cylindrical lens test set-up version, using a PC for control and data processing will be explained. For the 330 mm long cylindrical lenses, the lateral straightness showed better than between 3 and 10 micrometers (peak to peak) and the longitudinal flatness between 20 and 80 micrometers (peak to peak) without corrective bending. It will be demonstrated that the aberration coefficients, as measured by this physical ray tracing approach, are in accordance with the results from numerical simulation by means of a commercially available ray-tracing program.

Citation Download Citation

Willem D. van Amstel, Peter F.A. van de Goor, Jef L. Horijon, and Peter G. J. M. Nuyens "Optical testing of long cylindrical lenses by means of scanning deflectometry", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405813

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KEYWORDS

Cylindrical lenses

Monochromatic aberrations

Ray tracing

3D scanning

Laser scanners

Electronics

Optical testing

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