Design and fabrication of near-field microscope using solid immersion lens

Hyoung Kil Yoon; Sunglim Park; Jun Hee Lee; Jungwoo Seo; Dae gab Gweon

doi:10.1117/12.417219

12 February 2001 Design and fabrication of near-field microscope using solid immersion lens

Hyoung Kil Yoon, Sunglim Park, Jun Hee Lee, Jungwoo Seo, Dae gab Gweon

Proceedings Volume 4190, Optomechatronic Systems; (2001) https://doi.org/10.1117/12.417219
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

12 In this paper, we designed and made a solid immersion lens (SIL) microscope using SIL (diameter equals 1 mm, refractive index n equals 1.83). Through the real experiment, we obtained the scanned-surface image of 700 nm and 300 nm standard specimens using SIL effect (compared with it's SEM scanning picture) an analyzed the result and error of image and system. According to this paper we can assure the capability of SIL microscope and possibility of the development of high-area density, large-capacity data storage device.

Citation Download Citation

Hyoung Kil Yoon, Sunglim Park, Jun Hee Lee, Jungwoo Seo, and Dae gab Gweon "Design and fabrication of near-field microscope using solid immersion lens", Proc. SPIE 4190, Optomechatronic Systems, (12 February 2001); https://doi.org/10.1117/12.417219

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available