Paper
24 October 2000 Extensible TCAD optimization framework combining gradient-based and genetic optimizers
Clemens Heitzinger, Siegfried Selberherr
Author Affiliations +
Proceedings Volume 4228, Design, Modeling, and Simulation in Microelectronics; (2000) https://doi.org/10.1117/12.405424
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
Abstract
Our simulation environment for semiconductor technology analysis is a flexible, user programmable tool for optimization and inverse modeling of semiconductor devices. It is easily customizable through an interactive, object- oriented and functional scripting language. Dynamic load balancing enables to take advantage of a cluster of hosts with minimal requirements on the software infrastructure. Our approach combines the advantages of gradient based and evolutionary algorithm optimizers and the capability of finding global extrema and thus make unattended optimizations without guessing starting values possible.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Clemens Heitzinger and Siegfried Selberherr "Extensible TCAD optimization framework combining gradient-based and genetic optimizers", Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); https://doi.org/10.1117/12.405424
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CITATIONS
Cited by 7 scholarly publications and 1 patent.
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KEYWORDS
Evolutionary algorithms

Optimization (mathematics)

TCAD

Computing systems

Nanoimprint lithography

Computer simulations

Genetics

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