4x4 MEMS optical cross-connections (OXCs)

Ai Qun Liu; Xu Ming Zhang; Yee Loy Lam

doi:10.1117/12.404901

20 October 2000 4x4 MEMS optical cross-connections (OXCs)

Ai Qun Liu, Xu Ming Zhang, Yee Loy Lam

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404901
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

This paper reports the design, fabrication and test of a monolithically-integrated 4 X 4 free-space optical crossconnect using microfabricated polysilicon 3D-mirror to enable light-path switching for optical communication applications. The switch consists of 16 pairs of 3D movable mirrors and draw-bridge plate actuators, and four input and output fiber-optic guiding rails. The draw-bridge plates actuated by the electrostatic force drive the 3D-mirrors up and down to cut off the light beam or to let the light beam pass through. The optical crossconnect is fabricated using three-layer-polysilicon surface micromachining technology. The size of the whole structures is 5 mm X 5 mm. The maximum driving voltage is about 45 V, and its resonant frequency is about 5 KHz (200 micrometers switch time). The optical insertion loss of about 1.5 dB and the crosstalk of less than -60 dB have been obtained while using GRIN- lens to collimate the input optical signals.

Citation Download Citation

Ai Qun Liu, Xu Ming Zhang, and Yee Loy Lam "4x4 MEMS optical cross-connections (OXCs)", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404901

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