Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces

E. L. Church

doi:10.1117/12.936346

15 November 1983 Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces

E. L. Church

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936346
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Methods for analyzing surface profile data in terms of the finish power spectral density and mean-square finish error are discussed. Results of a preliminary comparison between mechanical- and optical-stylus measurements of a set of precision-machined surfaces are presented. Excellent quantitative agreement is obtained, although certain features observed in the case of strongly periodic surfaces require further study.

Citation Download Citation

E. L. Church "Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936346

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available