Experimental VUV absorbance study of fluorine-functionalized polystyrenes

Roderick R. Kunz; Roger F. Sinta; Michael Sworin; William A. Mowers; Theodore H. Fedynyshyn; Vladimir Liberman; Jane E. Curtin

doi:10.1117/12.436858

24 August 2001 Experimental VUV absorbance study of fluorine-functionalized polystyrenes

Roderick R. Kunz, Roger F. Sinta, Michael Sworin, William A. Mowers, Theodore H. Fedynyshyn, Vladimir Liberman, Jane E. Curtin

Author Affiliations +

Proceedings Volume 4345, Advances in Resist Technology and Processing XVIII; (2001) https://doi.org/10.1117/12.436858
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

A number of fluoro-functionalized poly(4-hydroxystyrene) derivatives, consisting of both blocked and unblocked hexafluoroisopropanol-substituted stryrenes, were prepared and their vacuum-ultraviolet absorption spectra were measured. From our efforts, we find that a wide range of synthetic flexibility exists and allows for a variety of fluorinated analogs of APEX-like and ESCAP-like copolymers and terpolymers with 157nm absorption coefficients less than 4.0micrometers . From these findings, we conclude that facile routes to high-performance 157nm resins are possible with optimum imaging thicknesses of 100 to 130nm.

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Roderick R. Kunz, Roger F. Sinta, Michael Sworin, William A. Mowers, Theodore H. Fedynyshyn, Vladimir Liberman, and Jane E. Curtin "Experimental VUV absorbance study of fluorine-functionalized polystyrenes", Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); https://doi.org/10.1117/12.436858

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