Long-time radiation-resistant optical coatings for UV excimer laser applications

Sven Laux; Helmut Bernitzki; Michael Klaus; Hans Lauth; Norbert Kaiser

doi:10.1117/12.425034

12 April 2001 Long-time radiation-resistant optical coatings for UV excimer laser applications

Sven Laux, Helmut Bernitzki, Michael Klaus, Hans Lauth, Norbert Kaiser

Proceedings Volume 4347, Laser-Induced Damage in Optical Materials: 2000; (2001) https://doi.org/10.1117/12.425034
Event: Laser-Induced Damage in Optical Materials: 2000, 2000, Boulder, CO, United States

Abstract

An example of a multilayer component for 248-nm excimer laser applications is explained in this contribution. By means of a polarizing beam splitter the potential of plasma- assisted deposition is shown. Such a coating shows a high reflecting and a high transmitting function for different polarization at a certain angle of incidence. High reflection requires a considerable number of layer pairs with a large total optical film thickness. Despite large film thickness, the optical absorption can be minimized and high transmission can be obtained. The laser induced damage threshold of such a coating is in the order of 2.5 J/cm² for single shot measurements at 20 ns pulse length. The life time is greater than 5X10⁹ shots at a fluence of 10mJ/cm². Very stable deposition conditions must be maintained to produce these coatings within small tolerance of the optical function. It was found that plasma-assisted deposition is a more reliable technology for producing these coatings compared to classical evaporation.

Citation Download Citation

Sven Laux, Helmut Bernitzki, Michael Klaus, Hans Lauth, and Norbert Kaiser "Long-time radiation-resistant optical coatings for UV excimer laser applications", Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); https://doi.org/10.1117/12.425034

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