Quadrature phase interferometer used to calibrate dial indicator calibrators

Shau-Chi Huang; Huay-Chung Liou; Gwo-Sheng Peng; Ming-Feng Lu

doi:10.1117/12.445644

22 October 2001 Quadrature phase interferometer used to calibrate dial indicator calibrators

Shau-Chi Huang, Huay-Chung Liou, Gwo-Sheng Peng, Ming-Feng Lu

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445644
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

To calibrate dial indicators, gage blocks or dial indicator calibrators are usually used. For better accuracy and resolution, interferometers are used to calibrate dial indicator calibrators. Systematic errors of laser interferometers can be classified into three categories of intrinsic errors, environment errors and installation errors. Intrinsic errors include laser wavelength error, electronic error and optics nonlinearity. In order to achieve nanometer accuracy, minimizing intrinsic error is crucial. In this paper, we will address the problems of minimizing the optics nonlinearity error and describe the discrete-time signal processing method to minimize the electronic error, nonlinearity error and drift by simply using quadrature phase interferometer for nanometer accuracy and linearity.

Citation Download Citation

Shau-Chi Huang, Huay-Chung Liou, Gwo-Sheng Peng, and Ming-Feng Lu "Quadrature phase interferometer used to calibrate dial indicator calibrators", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445644

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