Cantilever-type PZT microsensor using resonance frequency for bioMEMS application

Kyung-II Hong; Seung-Beom Kim; Sang-Jin Kim; Duck-Kyun Choi

doi:10.1117/12.454611

19 November 2001 Cantilever-type PZT microsensor using resonance frequency for bioMEMS application

Kyung-II Hong, Seung-Beom Kim, Sang-Jin Kim, Duck-Kyun Choi

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454611
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Among various materials for microelectromechanical systems (MEMS) devices, piezoelectric thin films have attracted considerable attention since they are one of the essential materials in microfabricated devices such as microsensors and microactuators. In this study, we propose a new and simple cantilever type Pb(Zr,Ti)O₃ [PZT] microsensor using RuO₂ which could detect the resonance frequency varation. Since RuO₂ has good electrical conductivity and stiffness, it can replace the double layer of electrode and supporting layer to a single layer in a cantilever beam. Also, Si substrate was isotropically etched from the surface using SF₆ plasma. These unique technique simplifies the structure and process of a cantilever. The cantilever consists of Al, PZT and RuO₂ layers. To find relationships between resonance frequency and shape of cantilever, microsensors with various widths and lengths were fabricated and their resonance frequencies were measured by laser doppler vabrometer (LDV) system. In addition, detection sensitivity of microsensor was investigated. The resonance frequency decreased as the length of cantilever increased.

Citation Download Citation

Kyung-II Hong, Seung-Beom Kim, Sang-Jin Kim, and Duck-Kyun Choi "Cantilever-type PZT microsensor using resonance frequency for bioMEMS application", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454611

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