Microdispenser array for highly parallel and accurate liquid handling

Peter Koltay; Reinhard Steger; G. Birkle; H.-C. Huang; Hermann Sandmaier; Roland Zengerle

doi:10.1117/12.454604

19 November 2001 Microdispenser array for highly parallel and accurate liquid handling

Peter Koltay, Reinhard Steger, G. Birkle, H.-C. Huang, Hermann Sandmaier, Roland Zengerle

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454604
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Liquid handling of volumes down to a few nanoliters is a key issue for modern bioanalytical and pharmaceutical research and industry. In this paper we present a modular dispensing device for the highly accurate delivery of liquids in the range of 10 nL - 500 nL at a precision of better than 5 % and a dosage rate up to 1000 nL/s. The reported dispensing technology is based on a fast mechanical displacement of liquid within a micromachined silicon chip (termed dosage chip). It overcomes limitations known from piezo-drop-on-demand dispensers or syringe-solenoid systems presently used in laboratory automation. The accurate and very robust multi channel system which is modularly built out of individual dispensers is able to handle a variety of different liquids simultaneously. A wide range of liquids with different physical properties can be handled with an up to now unequalled precision in that volume range. The working principle of the device as well as newest characterization results are presented.

Citation Download Citation

Peter Koltay, Reinhard Steger, G. Birkle, H.-C. Huang, Hermann Sandmaier, and Roland Zengerle "Microdispenser array for highly parallel and accurate liquid handling", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454604

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