Electromagnetic remote control and downscaling advantages and examples for MOEMS

Gilbert Reyne; Lionel Houlet; Yoshifumi Takahashi; Tarik Bourouina; Hiroyuki Fujita

doi:10.1117/12.448967

21 November 2001 Electromagnetic remote control and downscaling advantages and examples for MOEMS

Gilbert Reyne, Lionel Houlet, Yoshifumi Takahashi, Tarik Bourouina, Hiroyuki Fujita

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448967
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Electromagnetic actuation is applied to MOEMS for industrial applications requiring large and long-range forces. Advantages and drawbacks are outlined while down scaling laws are discussed. Technological improvements and new available materials bring to much smaller dimensions, the limit between Electromagnetism and Electrostatics. Remote control and bi-stability are unique characteristics of electromagnetic actuation. The importance of remote control is stressed so as to allow easy tests and optimization with no technological compatibility problem. These advantages are illustrated on three different electromagnetic MOEMS, developed in LIMMS, a Franco-Japanese research Laboratory based in Tokyo. The first is a resonant 1D magnetic scanner, the second is a magnetic bi-stable matrix array of optical micro-switches and the last is a remarkable application of the properties of thick Magnetostrictive thin layers to a 2D scanner.

Citation Download Citation

Gilbert Reyne, Lionel Houlet, Yoshifumi Takahashi, Tarik Bourouina, and Hiroyuki Fujita "Electromagnetic remote control and downscaling advantages and examples for MOEMS", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448967

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