Paper
29 October 2001 Laser-diode-based optical sensor for laser particle counter
Huijie Huang, Yongkai Zhao, Ren Bingqiang, Longlong Du, Zhaogu Cheng, Dunwu Lu
Author Affiliations +
Proceedings Volume 4595, Photonic Systems and Applications; (2001) https://doi.org/10.1117/12.446633
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore
Abstract
A laser-diode based optical sensor for laser particle counter is described,nd some calculated and test results are reported in this paper. A low-powered 650 nm laser diode is used as the light source. The optical system of the sensor is a right- angle scattering optics, which consists of an illumination system and a wide-angle collection system for scattered light. The sensor features high counting efficiency and high signal- to-noise ratio for smaller particles.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huijie Huang, Yongkai Zhao, Ren Bingqiang, Longlong Du, Zhaogu Cheng, and Dunwu Lu "Laser-diode-based optical sensor for laser particle counter", Proc. SPIE 4595, Photonic Systems and Applications, (29 October 2001); https://doi.org/10.1117/12.446633
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KEYWORDS
Particles

Atmospheric particles

Semiconductor lasers

Sensors

Light scattering

Laser optics

Optical proximity correction

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