Using carbon nanotube cantilevers in scanning probe metrology

Rudy Schlaf; Yusuf Emirov; Jay A. Bieber; Arun Sikder; J. Kohlscheen; Deron A. Walters; Mohammed R. Islam; Bhavik Metha; Z. F. Ren; Terri L. Shofner; Benjamin B. Rossie; Michael W. Cresswell

doi:10.1117/12.473496

16 July 2002 Using carbon nanotube cantilevers in scanning probe metrology

Rudy Schlaf, Yusuf Emirov, Jay A. Bieber, Arun Sikder, J. Kohlscheen, Deron A. Walters, Mohammed R. Islam, Bhavik Metha, Z. F. Ren, Terri L. Shofner, Benjamin B. Rossie, Michael W. Cresswell

Author Affiliations +

Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473496
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Carbon nanotubes (CNT) are among the candidates for atomic force microscopy probes for use in high aspect ratio critical dimension metrology (CDM). Their mechanical strength at small diameters makes them ideal probes for narrow and deep features. The synthesis of CNT has been making great progress in recent years. The use of CNT in scanning probe microscopy, however, has been limited due to a number of problems. While the CNT probes generally appear to be long lasting, the manufacture of precisely aligned CNT of defined length, diameter and number of walls poses a number of challenges. Yet, such precisely defined CNT probes seem to be required if the cantilevers are to be used for CDM. Our result demonstrate, for example, that the attachment angle of CNT with respect to the cantilever beam is crucial for their application in CDM. We report about our efforts to overcome these problems by growing well-defined CNT on standard Si cantilevers using chemical vapor deposition in combination with focused ion-beam machining techniques.

Citation Download Citation

Rudy Schlaf, Yusuf Emirov, Jay A. Bieber, Arun Sikder, J. Kohlscheen, Deron A. Walters, Mohammed R. Islam, Bhavik Metha, Z. F. Ren, Terri L. Shofner, Benjamin B. Rossie, and Michael W. Cresswell "Using carbon nanotube cantilevers in scanning probe metrology", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473496

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