Ultrasonic atomic force microscopy with real-time mapping of resonance frequency and Q factor

Kazushi Yamanaka; Hiroshi Irihama; Toshihiro Tsuji; Keiichi Nakamoto

doi:10.1117/12.469611

7 June 2002 Ultrasonic atomic force microscopy with real-time mapping of resonance frequency and Q factor

Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto

Proceedings Volume 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems; (2002) https://doi.org/10.1117/12.469611
Event: NDE For Health Monitoring and Diagnostics, 2002, San Diego, California, United States

Abstract

Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

Citation Download Citation

Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, and Keiichi Nakamoto "Ultrasonic atomic force microscopy with real-time mapping of resonance frequency and Q factor", Proc. SPIE 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems, (7 June 2002); https://doi.org/10.1117/12.469611

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