Paper
19 June 2002 High-accuracy interferometric measurement of aspheres
Ingolf Weingaertner, Michael Schulz
Author Affiliations +
Abstract
The paper is structured as follows: After some general statements, we will discuss types of aspheres, then typical applications for aspheres, general aspects of interferometric methods for measuring aspheres, special methods for weak aspheres, permutation methods for mathematically simple aspheres, compensation optics, traceable methods, and at the end other methods.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ingolf Weingaertner and Michael Schulz "High-accuracy interferometric measurement of aspheres", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473533
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Aspheric lenses

Interferometry

Aspheric optics

Distance measurement

Wavefronts

Sensors

EUV optics

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