Fabrication and characterization of Sb-doped Sn02 thin films derived from methacrylic-acid-modified tin(IV)alkoxides

Terho K. Kololuoma; Ari Tolonen; Leena-Sisko Johansson; Joseph M. Campbell; Ari H. O. Karkkainen; Marianne Hiltunen; Tomi Haatainen; Juha T. Rantala

doi:10.1117/12.453546

23 October 2002 Fabrication and characterization of Sb-doped Sn0₂ thin films derived from methacrylic acid modified tin(IV)alkoxides

Terho K. Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph M. Campbell, Ari H. O. Karkkainen, Marianne Hiltunen, Tomi Haatainen, Juha T. Rantala

Author Affiliations +

Proceedings Volume 4804, Sol-Gel Optics VI; (2002) https://doi.org/10.1117/12.453546
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.

Citation Download Citation

Terho K. Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph M. Campbell, Ari H. O. Karkkainen, Marianne Hiltunen, Tomi Haatainen, and Juha T. Rantala "Fabrication and characterization of Sb-doped Sn0₂ thin films derived from methacrylic acid modified tin(IV)alkoxides", Proc. SPIE 4804, Sol-Gel Optics VI, (23 October 2002); https://doi.org/10.1117/12.453546

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available