Diffraction method for checking the sidebar defects of a small round hole

Vitaly G. Magurin; Vladimir Alexeevich Tarlykov

doi:10.1117/12.484599

29 July 2002 Diffraction method for checking the sidebar defects of a small round hole

Vitaly G. Magurin, Vladimir Alexeevich Tarlykov

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484599
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

A high-sensitive method for detection and determination of the geometrical parameters of round hole sidebar defects, based on solution of inverse problem of diffraction of laser radiation on the given hole is considered. The principle of solution is analysis of the general and fine structure of diffraction patterns by means of geometrical theory of diffraction.

Citation Download Citation

Vitaly G. Magurin and Vladimir Alexeevich Tarlykov "Diffraction method for checking the sidebar defects of a small round hole", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484599

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available