Use of a microprobe held by a laser beam for the study of surface reliefs

Petr Jakl; Jan Jezek; Mojmir Sery; Alexandr Jonas; Pavel Zemanek

doi:10.1117/12.484462

29 July 2002 Use of a microprobe held by a laser beam for the study of surface reliefs

Petr Jakl, Jan Jezek, Mojmir Sery, Alexandr Jonas, Pavel Zemanek

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484462
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

We present a method which uses two-photon fluorescence excited in an optically confined fluorescent-labelled probe by the trapping beam for the study of topology of transparent surfaces. We demonstrate that for probe diameter of 200 nm, the vertical resolution of the method is better than 25nm.

Citation Download Citation

Petr Jakl, Jan Jezek, Mojmir Sery, Alexandr Jonas, and Pavel Zemanek "Use of a microprobe held by a laser beam for the study of surface reliefs", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484462

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