Reciprocating silicon microtribometer

Philippe Dubois; Stephane von Gunten; August Enzler; Urs Lippuner; Alex Dommann; Nicolaas-F. de Rooij

doi:10.1117/12.478200

16 January 2003 Reciprocating silicon microtribometer

Philippe Dubois, Stephane von Gunten, August Enzler, Urs Lippuner, Alex Dommann, Nicolaas-F. de Rooij

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.478200
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The microtribometer fabricated is designed to observe the wear of removable flat silicon test inserts, coated with thin film layers such as DLC and moving in an oscillating manner relatively to each other. For observing the low wear of DLC layers in a reasonable amount of time, high oscillating speed is essential and can be achieved by reducing the mass in motion. The silicon microtribometer reaches oscillating frequencies of 10 Hz while applying a normal force on the test inserts up to 9.6 N, the maximal displacement amplitude being 1.5 mm. The two silicon main parts of the microtribometer guide test inserts along one direction in a back and forth motion while avoiding any side friction, the actuation being done by an external linear motor. For such application crystalline silicon presents, compare to other materials, the advantage of the invariance of its behavior over time.

Citation Download Citation

Philippe Dubois, Stephane von Gunten, August Enzler, Urs Lippuner, Alex Dommann, and Nicolaas-F. de Rooij "Reciprocating silicon microtribometer", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.478200

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