Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients

Gary D. Gray; Matthew J. Morgan; Paul A. Kohl

doi:10.1117/12.478172

16 January 2003 Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients

Gary D. Gray, Matthew J. Morgan, Paul A. Kohl

Author Affiliations +

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.478172
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A stress gradient was induced in two directions (through the plane of the beam and along its length) to produce a beam deflection of specific curvature. The stress gradient was produced by altering the conditions during electroplating. The pull-down characteristics of four electrostatic actuators were measured. Stressed, hard gold was patterned in a triangular shape on top of stress-free soft gold. This stress gradient along the length of the beams significantly improved the tuning range compared with devices containing spatially uniform stress. The tuning range of the variably stressed gold devices improved by 30 percent for the double-hinged square devices, by 45 percent for the double-hinged elliptical devices, and by 35 percent for the double-hinged rectangular device. Voltage cycling and temperature variation has no significant impact on the pull-down characteristics of the actuator.

Citation Download Citation

Gary D. Gray, Matthew J. Morgan, and Paul A. Kohl "Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.478172

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