Paper
17 January 2003 Development of a microfluidic drug delivery neural prosthesis using a wide-bandgap semiconductor waveguide structure
Mona R. Safadi, Gregory W. Auner, Raymond Iezzi, Pat McAllister, Gary Abrams
Author Affiliations +
Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478158
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
We have developed a microfluidic retinal prosthesis, using wide bandgap optical wavelength semiconductor thin film waveguides, to facilitate spatial and quantitative photactivation of “caged” neurotransmitter to microfluidic channels. Novel waveguide materials and micromachining technology are necessary to fabricate 360 nanometer capable waveguides for the microfluidic device. Single crystal wide bandgap semiconductor thin films are grown on sapphire by plasma source molecular beam epitaxy (PSMBE). 248 nanometer KrF Excimer laser micromachining technology is employed to micro-fabricate wave-guiding channels and microfluidic structures. A waveguide that allows for spatial and temporal drug delivery within the retina was fabricated. In addition, there is a need for a waveguide structure that may be used in physiological drug delivery systems. A device that may deliver ultraviolet light in precise intensities and to selective areas of a microfluidic implant without direct ultraviolet exposure to the biological cells is needed in retinal and cortical implants. Results of a prototype microfluidic waveguide system will be presented.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mona R. Safadi, Gregory W. Auner, Raymond Iezzi, Pat McAllister, and Gary Abrams "Development of a microfluidic drug delivery neural prosthesis using a wide-bandgap semiconductor waveguide structure", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.478158
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Cited by 3 scholarly publications.
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KEYWORDS
Waveguides

Aluminum nitride

Microfluidics

Sapphire

Laser ablation

Micromachining

Thin films

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