Laser processing of microfluidic components and bioMEMS

Elizabeth K. Illy; Graham Rutterford; Andrew I. Bell; Martyn R. H. Knowles

doi:10.1117/12.478559

17 January 2003 Laser processing of microfluidic components and bioMEMS

Elizabeth K. Illy, Graham Rutterford, Andrew I. Bell, Martyn R. H. Knowles

Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478559
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Micro-processing with lasers is an enabling technology for microfluidics and bioMEMS due to the high precision, accuracy and resolution achievable using laser sources. Visible micromachining of metals and ceramics has proved an efficient and precise way of producing spotting pins for high-throughput screening applications. UV micromachining of the polymer materials often used in metered dose inhalers (MDI) and other medical devices is efficient due to the high absorption properties of these polymers. Key to these types of devices is the accuracy and reproducibility. This paper describes the use of copper vapour lasers to produce micro-fluidic and bioMEMS type components.

Citation Download Citation

Elizabeth K. Illy, Graham Rutterford, Andrew I. Bell, and Martyn R. H. Knowles "Laser processing of microfluidic components and bioMEMS", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.478559

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