Paper
1 April 2003 PEEM/LEEM resolution
O. D. Potapkin, A. S. Belanov
Author Affiliations +
Proceedings Volume 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; (2003) https://doi.org/10.1117/12.498007
Event: Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2001, Moscow, Russian Federation
Abstract
Universal expression for PEEM/LEEM resolution was found for a case when chromatical aberration and diffraction are limiting factors and for compound electrostatic and magnetic fields. This expression has the following advantage: it depends on emission energy and as a result resolution can be calculated for any electron start energy using psi function. It can be useful to find the best theoretical resolution.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
O. D. Potapkin and A. S. Belanov "PEEM/LEEM resolution", Proc. SPIE 5025, Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 April 2003); https://doi.org/10.1117/12.498007
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KEYWORDS
Magnetism

Diffraction

Ions

Electron microscopes

Information science

Manufacturing

Microscopes

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