Interferometric method for deformation measurement of structures in industry

Antonin Miks; Jiri Novak

doi:10.1117/12.498236

8 July 2003 Interferometric method for deformation measurement of structures in industry

Antonin Miks, Jiri Novak

Proceedings Volume 5036, Photonics, Devices, and Systems II; (2003) https://doi.org/10.1117/12.498236
Event: Photonics, Devices, and Systems II, 2002, Prague, Czech Republic

Abstract

Interferometric measurement methods are based on the principle of interference of two coherent wave fields (object and reference) and consequent evaluation of the interference pattern. The measured quantity, e.g. deformation, is related to the optical path difference between both wave fields, which depends on the phase of the object wave field. The phase can be obtained from the values of the intensity of the interference field with phase measuring techniques. In the work there was proposed an optical method for measuring of static deformations based on the interference of coherent wave fields and phase shifting procedure. Detailed analysis of the measurement and evaluation process with respect to most important factors is performed.

Citation Download Citation

Antonin Miks and Jiri Novak "Interferometric method for deformation measurement of structures in industry", Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); https://doi.org/10.1117/12.498236

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