Paper
17 January 1985 A New Instrument For Constant (B-Bo) Scatter Mapping Of Contiguous Optical Surfaces Of Up To 25 Square Inches
Robert M. Silva, Fred D. Orazio Jr., Robert B. Sledge Jr.
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Abstract
The measurement of scattered light has become more important during the past few years because of the increased ability to use this information in evaluating low scatter optics such as space optics, ring laser gyro and high energy laser optics, and most particularly, in the evaluation of electronic materials. Single point measurements are also no longer sufficient for characterizing surfaces, since it has been found that point to point variations in scatter can be of considerable magnitude. The instrument described in this paper is a highly accurate scatter measuring system which is capable of taking more than 150 million data points in a 125 x 125mm (5" x 5") square area. This data can be used to analyze both the surface and subsurface characteristics of a test article and the information used as a feedback mechanism to change the production process for improved quality.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert M. Silva, Fred D. Orazio Jr., and Robert B. Sledge Jr. "A New Instrument For Constant (B-Bo) Scatter Mapping Of Contiguous Optical Surfaces Of Up To 25 Square Inches", Proc. SPIE 0511, Stray Radiation IV, (17 January 1985); https://doi.org/10.1117/12.945034
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KEYWORDS
Bidirectional reflectance transmission function

Photomultipliers

Semiconducting wafers

Scatter measurement

Gallium arsenide

Reflectivity

Silicon

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