Nanometer-scale analysis of current limited stresses impact on SiO2 gate oxide reliability using C-AFM

Marc Porti; Montserrat Nafria; Xavier Aymerich

doi:10.1117/12.498778

29 April 2003 Nanometer-scale analysis of current limited stresses impact on SiO₂ gate oxide reliability using C-AFM

Marc Porti, Montserrat Nafria, Xavier Aymerich

Proceedings Volume 5118, Nanotechnology; (2003) https://doi.org/10.1117/12.498778
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

The effect of current limited stresses (CLS) on the breakdown (BD) SiO₂ gate oxides has been analyzed at a nanometric scale with a Conductive Atomic Force Microscope (C-AFM). Bare oxide regions have been stresed and broken down using the tip of the C-AFM as the metal electrode of a metal-oxide-semiconductor (MOS) structure. Afterwards, post-BD I-V characteristics and topographical and current images of the affected areas have been obtained to analyze the post-BD conduction, the structural damage induced in the oxide and the BD propagation. The results shwo that BD phenomenon, although triggered at one point, is electrically propagated to neighbor regions. Moreover, the area affected by BD, the structural damage and the post-BD conduction depend on the breakdown hardness. In particular, it is shown that these magnitudes are smaller when the current through the structure is limited during BD transient.

Citation Download Citation

Marc Porti, Montserrat Nafria, and Xavier Aymerich "Nanometer-scale analysis of current limited stresses impact on SiO₂ gate oxide reliability using C-AFM", Proc. SPIE 5118, Nanotechnology, (29 April 2003); https://doi.org/10.1117/12.498778

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available