Performance evaluation of a MEMS-based deformable mirror for adaptive optics

Brian Wallace; Colin Bradley; Peter Hampton

doi:10.1117/12.506587

11 December 2003 Performance evaluation of a MEMS-based deformable mirror for adaptive optics

Brian Wallace, Colin Bradley, Peter Hampton

Proceedings Volume 5162, Advanced Wavefront Control: Methods, Devices, and Applications; (2003) https://doi.org/10.1117/12.506587
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Adaptive optics systems have seen widespread adoption in the astronomy community. However, next generation telescopes with large apertures and wide fields of view, not to mention the desire to correct for atmospheric turbulence at optical wavelengths, will require a dramatic increase in the number of actuators required for correction. Micro-Electro-Mechanical Systems (MEMS) provide a potential solution to this demand for densely packed actuator arrays. In this paper the characteristics of a 140 actuator MEMS based deformable mirror (DM) are investigated with particular emphasis on its application in astronomical adaptive optics systems. In particular the DM surface quality, actuator stroke and influence function are investigated as well as the residual error when attempting to correct Zernike modes.

Citation Download Citation

Brian Wallace, Colin Bradley, and Peter Hampton "Performance evaluation of a MEMS-based deformable mirror for adaptive optics", Proc. SPIE 5162, Advanced Wavefront Control: Methods, Devices, and Applications, (11 December 2003); https://doi.org/10.1117/12.506587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available