Scalable surface profiling using multiwavelength heterodyne interferometry

Lenore McMackin

doi:10.1117/12.511873

11 December 2003 Scalable surface profiling using multiwavelength heterodyne interferometry

Lenore McMackin

Proceedings Volume 5162, Advanced Wavefront Control: Methods, Devices, and Applications; (2003) https://doi.org/10.1117/12.511873
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Super-heterodyne array interferometry enhances the ability of a laser-based system to unambiguously measure surfaces with features that are much deeper than the optical wavelength. Super-heterodyning combines measurements of the surface made at different optical wavelengths to effectively create synthetic wavelengths that can be much larger than the optical regime. The additional information obtained from a set of measurements of the same surface taken at different wavelengths is used by a phase unwrapping algorithm to automatically reconstruct the surface phase profile without phase jumps. We describe the development of an automated heterodyne interferometry technique with scalable dynamic range for measuring the surface profile of surfaces with large deviations and step features. Combined concepts from phase shifting interferometry, super-heterodyne imaging, and multiple-wavelength holography are reviewed. A phase unwrapping algorithm is also described that is useful in the context of applications such as adaptive and deployable optics or automated inspection, that may require automatic effective wavelength selection for adaptive resolution in the measurement of surface deviation. Extension to fully automated surface measurement is discussed.

Citation Download Citation

Lenore McMackin "Scalable surface profiling using multiwavelength heterodyne interferometry", Proc. SPIE 5162, Advanced Wavefront Control: Methods, Devices, and Applications, (11 December 2003); https://doi.org/10.1117/12.511873

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KEYWORDS

Heterodyning

Interferometry

Beam splitters

Control systems

Phase interferometry

Holographic interferometry

Profiling

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