Appearance characterization by a scatterometer employing a hemispherical screen

Sipke Wadman; Stefan Baumer

doi:10.1117/12.503560

16 October 2003 Appearance characterization by a scatterometer employing a hemispherical screen

Sipke Wadman, Stefan Baumer

Proceedings Volume 5189, Surface Scattering and Diffraction III; (2003) https://doi.org/10.1117/12.503560
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Characterization of optical appearance by measurement of the hemispherical scattering distribution using a concave projection screen and a camera is investigated. Secondary intensities by repeated internal screen reflections can be measured separately and compensated for. The concept is coupled to functional properties of product surfaces and we use it in an industrial environment. Only little less accurate than a photogoniometer, the hardware is much cheaper, contains no moving parts and is up to 1000 times faster.

Citation Download Citation

Sipke Wadman and Stefan Baumer "Appearance characterization by a scatterometer employing a hemispherical screen", Proc. SPIE 5189, Surface Scattering and Diffraction III, (16 October 2003); https://doi.org/10.1117/12.503560

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