High-fill-factor burst-frame-rate charge-coupled device

Robert K. Reich; Daniel M. O'Mara; Douglas J. Young; Andrew H. Loomis; Dennis D. Rathman; David M. Craig; Scott A. Watson; Michael D. Ulibarri; Bernard B. Kosicki

doi:10.1117/12.520901

6 February 2004 High-fill-factor burst-frame-rate charge-coupled device

Robert K. Reich, Daniel M. O'Mara, Douglas J. Young, Andrew H. Loomis, Dennis D. Rathman, David M. Craig, Scott A. Watson, Michael D. Ulibarri, Bernard B. Kosicki

Author Affiliations +

Proceedings Volume 5210, Ultrahigh- and High-Speed Photography, Photonics, and Videography; (2004) https://doi.org/10.1117/12.520901
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

A 512x512-element, multi-frame charge-coupled device (CCD) has been developed for collecting four sequential image frames at megahertz rates. To operate at fast frame rates with high sensitivity, the imager uses an electronic shutter technology developed for back-illuminated CCDs. Device-level simulations were done to estimate the CCD collection well spaces for sub-microsecond photoelectron collection times. Also required for the high frame rates were process enhancements that included metal strapping of the polysilicon gate electrodes and a second metal layer. Tests on finished back-illuminated CCD imagers have demonstrated sequential multi-frame capture capability with integration intervals in the hundreds of nanoseconds range.

Citation Download Citation

Robert K. Reich, Daniel M. O'Mara, Douglas J. Young, Andrew H. Loomis, Dennis D. Rathman, David M. Craig, Scott A. Watson, Michael D. Ulibarri, and Bernard B. Kosicki "High-fill-factor burst-frame-rate charge-coupled device", Proc. SPIE 5210, Ultrahigh- and High-Speed Photography, Photonics, and Videography, (6 February 2004); https://doi.org/10.1117/12.520901

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