Large-output-force out-of-plane MEMS actuator array

Takashi Fukushige; Seiichi Hata; Akira Shimokohbe

doi:10.1117/12.521842

2 April 2004 Large-output-force out-of-plane MEMS actuator array

Takashi Fukushige, Seiichi Hata, Akira Shimokohbe

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.521842
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

We present herein a new out-of-plane MEMS actuator array. Previously, we developed out-of-plane MEMS actuators having a 180-μm stroke in the out-of-plane direction. However, the maximum output force, scale of integration and density of integration were limited to 0.087 mN, four actuators and 4 mm²/actuator, respectively. In the present paper, we propose a new calculation method by which to estimate the maximum output force and driving voltage according to conventional mechanics of materials. The improved shape of the actuator was derived using this method, and the maximum output force was increased up to 0.83 mN, which is approximately 10 times larger than that of the previous actuator. The scale and density of integration were improved via multilayer interconnection up to 100 actuators (25 times) and 1 mm²/actuator (a four-fold increase), respectively. In addition, we examined the driving behavior of the actuator array.

Citation Download Citation

Takashi Fukushige, Seiichi Hata, and Akira Shimokohbe "Large-output-force out-of-plane MEMS actuator array", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.521842

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