Manufacturing microdroplet generators with Laser-LIGA technique

Joeska Husny; Hengyi Jin; Erol C. Harvey; Justin J Cooper-White

doi:10.1117/12.522744

2 April 2004 Manufacturing microdroplet generators with Laser-LIGA technique

Joeska Husny, Hengyi Jin, Erol C. Harvey, Justin J Cooper-White

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.522744
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

Monodisperse micro-drops have been created successfully in T-shaped microchannels fabricated with the 'modified’ excimer laser-LIGA technique. This technique eliminates the surface wetting problems and the occurrence of a deeper ablation path which happened during the joining of different section of the microchannel with the dynamic laser ablation mode. The experimental study on the shear-induced drop formation from T-shaped microchannels shows that the drop size decreases with increasing shear and that a maximum drop productivity was observed depending on the value of the dispersed phase flowrate used.

Citation Download Citation

Joeska Husny, Hengyi Jin, Erol C. Harvey, and Justin J Cooper-White "Manufacturing microdroplet generators with Laser-LIGA technique", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.522744

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