CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 5392 > Article
Open Access Paper
21 July 2004 Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance
Bernd Koehler, Juergen Schreiber, Beatrice Bendjus, Martin Herms, Valeri Melov, Lukas Helfen, Petr Mikulik, Tilo Baumbach
Author Affiliations +
Proceedings Volume 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II; (2004) https://doi.org/10.1117/12.541652
Event: NDE for Health Monitoring and Diagnostics, 2004, San Diego, CA, United States
Abstract
NDE activities at the Laboratory for Acoustic Diagnosis and Quality Assurance (EADQ) Dresden are outlined. The applied methods comprise acoustic, thermal, optical and X-ray ones. Additionally, scanning probe methods (SPM) and scanning electron microscopy (SEM) are used. Combinations of different methods are especially effective. This is demonstrated for the coupling of an acoustic approach with SEM. For NDE on a micro- and nano-meter scale, preparation of appropriate test flaws and the verification of the NDE results turn out to be a challenge. To meet this challenge, we propose an approach based on focused ion beam technique.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Bernd Koehler, Juergen Schreiber, Beatrice Bendjus, Martin Herms, Valeri Melov, Lukas Helfen, Petr Mikulik, and Tilo Baumbach "Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance", Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); https://doi.org/10.1117/12.541652
PROCEEDINGS
 15 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Scanning electron microscopy
Acoustics
X-rays
Nondestructive evaluation
Mirrors
Semiconducting wafers
Microscopy
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top