Photoresist reflow method of microlens production: modeling and fabrication techniques

Feidhlim T. O'Neill; Christopher R. Walsh; John T. Sheridan

doi:10.1117/12.553316

1 September 2004 Photoresist reflow method of microlens production: modeling and fabrication techniques

Feidhlim T. O'Neill, Christopher R. Walsh, John T. Sheridan

Proceedings Volume 5456, Photon Management; (2004) https://doi.org/10.1117/12.553316
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The development of an inexpensive, reproducible and highly accurate method for the production of microlens arrays is of vital importance to the next generation of optics based technologies. One of the fabrication techniques used to produce microlens arrays, the photoresist reflow method, will be discussed. When lenses are produced using this method they are often found to have aspherical profiles. Aspheric lenses have applications that include beam shaping, power transfer and fiber coupling. The fabrication of these aspheric lenses currently requires an iterative experimental process as there is currently no model that accurately predicts the lens profiles from first principles. One model that shows promise is the Curvature Correction Model, CCM. In this paper we propose a novel mathematical method to solve approximately the CCM, thus enabling predictions of the expected microlens profile. This technique can then be used to determine a starting range for the fabrication parameters to design a specific lens. This novel method also provides a framework within which a number of polynomial models, that have been presented in the literature, can be examined in the context of the CCM.

Citation Download Citation

Feidhlim T. O'Neill, Christopher R. Walsh, and John T. Sheridan "Photoresist reflow method of microlens production: modeling and fabrication techniques", Proc. SPIE 5456, Photon Management, (1 September 2004); https://doi.org/10.1117/12.553316

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available