A giant linear Fresnel zone plate as a hard x-ray condenser

Angel Mazuelas; Anatoly A. Snigirev; Irina I. Snigireva; Christian David; Peter Boesecke; Hamid Djazouli; Till H. Metzger

doi:10.1117/12.561337

4 November 2004 A giant linear Fresnel zone plate as a hard x-ray condenser

Angel Mazuelas, Anatoly A. Snigirev, Irina I. Snigireva, Christian David, Peter Boesecke, Hamid Djazouli, Till H. Metzger

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Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.561337
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We present the design and test of a large aperture linear Fresnel zone plate (FZP) as a condensing lens for hard X-rays. The FZP is made of Si and is defined by electron beam lithography and chemical wet etching of <110> oriented silicon substrates. The central zone is 75 μm wide, the outermost lines have a width of 0.35 μm, and the structures have a height of 10 μm. These parameters result in an optimal focusing distance of 9 m, a phase shift of π, and a diffraction efficiency of about 30% at 7.3 keV. We have tested the FZP at the Anomalous Scattering Beamline (ID01) of the ESRF. The FZP was inserted in the vacuum chamber in the Optics Hutch at 38.5 m from the source and 9 m from the sample. We have studied the dependence of beam size and gain as a function of energy in the range from 7 to 8.5 keV. We found the optimum energy range as 7.2-7.4 keV, where the focused beam width was 100 μm and the experimental gain was 9.2, for an expected theoretical value of 9.6.

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Angel Mazuelas, Anatoly A. Snigirev, Irina I. Snigireva, Christian David, Peter Boesecke, Hamid Djazouli, and Till H. Metzger "A giant linear Fresnel zone plate as a hard x-ray condenser", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.561337

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