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The progress in the development of Si-based Surface Plasmon Resonance sensing technology is reported. This technology uses multi-layer structures with a gold film and a silicon prism in the Kretschmann-Raether geometry and makes potentially possible the miniaturization and integration of the sensor device on a silicon-based microplatform. We show conditions of the simultaneous excitation for two plasmon polariton modes over both sides of the gold film using different intermediate layers, between the high-refractive index silicon prism and the gold, and examine their response in configurations of the conventional and nanoparticle-enhanced sensing. The system has been calibrated in real-time measurements of protein (Concanavalin A) adsorption.
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Sergiy Patskovsky, Andrei V. Kabashin, Michel Meunier, John H.T. Luong, "Sensing properties of surface plasmon resonance in different multilayer Si-based structures," Proc. SPIE 5577, Photonics North 2004: Optical Components and Devices, (20 December 2004); https://doi.org/10.1117/12.567689