Paper
13 January 2005 Solid state UV laser technology for electronic packaging applications
Weisheng Lei, John Davignon
Author Affiliations +
Abstract
This presentation introduces solid state UV laser drilling technology for electronic packaging applications which mainly includes generating microvias in high-density interconnects (HDI) printed wiring boards (PWB) and integrated circuit (IC) chip packaging devices. The first three sections discuss the drilling process technology in terms of substrate materials, via quality requirements, laser-materials interaction, via formation processes, laser beam profiles, and system hardware. The remaining sections cover some typical application examples including via drilling, soldermask ablation, and routing to explain the UV laser process capability with the common PWB materials.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weisheng Lei and John Davignon "Solid state UV laser technology for electronic packaging applications", Proc. SPIE 5629, Lasers in Material Processing and Manufacturing II, (13 January 2005); https://doi.org/10.1117/12.571520
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Laser drilling

Ultraviolet radiation

Copper

Laser applications

Packaging

Glasses

Solid state electronics

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