Paper
23 February 2005 Injection molding of grating optical elements with microfeatures
Cheng-Hsien Wu, Wei-Hsu Chen
Author Affiliations +
Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.582425
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia
Abstract
Many micro devices have been successfully injection molded. Efforts need to be made to identify the significant factors that affect micro filling behaviors. The objective of this paper is to investigate the application of injection molding and injection compression molding processes to produce diffraction gratings. A mold was designed to produce a diffraction rating connected with the fixed bushing. The combined part was verified to have a good diffraction performance. Integrated grating eliminates the assembly cost and error. Photolithography was applied to make the mold insert. The Taguchi method and parametric analysis were applied to study the effects of molding parameters on grating quality. The design, fabrication of structured mold surfaces and the results of the replication by injection molding (IM) and injection compression molding (ICM) are presented and compared.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cheng-Hsien Wu and Wei-Hsu Chen "Injection molding of grating optical elements with microfeatures", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582425
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Cited by 3 scholarly publications.
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KEYWORDS
Diffraction gratings

Diffraction

Semiconducting wafers

Nickel

Photomasks

Beam splitters

Electroplating

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