Fabrication of SiGe-on-insulator and applications for strained Si

Chenglu Lin; Weili Liu; Zhenghua An; Zengfeng Di; Miao Zhang

doi:10.1117/12.607473

8 December 2004 Fabrication of SiGe-on-insulator and applications for strained Si

Chenglu Lin, Weili Liu, Zhenghua An, Zengfeng Di, Miao Zhang

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607473
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

SiGe-On-Insulator (SGOI) is an ideal substrate material for realizing strained-silicon structures that are very competing and popular in present silicon technology. In this paper, two methods are proposed to fabricate SGOI novel structure. One is modified Separation by Implantation of Oxygen (SIMOX) starting from pseuodomorphic SiGe thin film without graded SiGe buffer layer. Results show that two-step annealing can improve the cystallinity quality of SiGe and block the Ge diffusion in high temperature annealing. SGOI structure with good quality has been obtained through two-step annealing at 800°C+1350°C. The second method is proposed to achieve SGOI with high content of Ge. High quality strained relax SiGe is grown on a compliant silicon-on-insulator (SOI) substrate by UHCVD firstly. During high temperature oxidation, Ge atoms diffuse into the top Si layer of SOI. We successfully obtain SGOI with the Ge content of 38%, which is available for the growth of strained Si.

Citation Download Citation

Chenglu Lin, Weili Liu, Zhenghua An, Zengfeng Di, and Miao Zhang "Fabrication of SiGe-on-insulator and applications for strained Si", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607473

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