Experiences from FTF NanoScience Lab at the University of Lund: use of a 2-stage isolation system with very low natural frequency

Claes R. Fredö; Jonas Brunskog

doi:10.1117/12.618950

18 August 2005 Experiences from FTF NanoScience Lab. at the University of Lund: use of a 2-stage isolation system with very low natural frequency

Claes R. Fredö, Jonas Brunskog

Author Affiliations +

Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 59330I (2005) https://doi.org/10.1117/12.618950
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A new clean room facility is in progress at the Division of Solid State Physics / Nanometer Consortium (FTF) at Lund University. On site measurement from road excitation at a speed bump located at a distance of 25 m from the site and from main roads situated at a few hundred meters distance revealed high vibration levels. A complicating matter was found in high lateral vibration levels at the 4 Hz range. Various set ups using piling and dig out were investigated and found not to improve the situation. A vibration isolation system with very low natural frequency was found to be the only way left to use the site. A modular set up has been used such that the system can be either 1-stage isolated or 2-stage isolated.

Citation Download Citation

Claes R. Fredö and Jonas Brunskog "Experiences from FTF NanoScience Lab. at the University of Lund: use of a 2-stage isolation system with very low natural frequency", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330I (18 August 2005); https://doi.org/10.1117/12.618950

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