High-performance Cr/Sc multilayers for the soft x-ray range

Sergiy Yulin; Torsten Feigl; Norbert Kaiser

doi:10.1117/12.624868

5 October 2005 High-performance Cr/Sc multilayers for the soft x-ray range

Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5963, Advances in Optical Thin Films II; 59631T (2005) https://doi.org/10.1117/12.624868
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Results of soft x-ray reflection measurements of Cr/Sc multilayer mirrors close to the Sc-L (λ = 3.11 nm) and C-K (λ = 4.44 nm) absorption edges are presented. In particular, normal-incidence reflectivity measurements performed at BESSY II facility revealed a reflectivity of R = 17.3% @ 3.11 nm and 7.0 % @ 4.44 nm. Simulation results show that the interface roughness in the best Cr/Sc structures are less than 0.4 nm and strongly depend on the crystal-line structure of the layers.

Citation Download Citation

Sergiy Yulin, Torsten Feigl, and Norbert Kaiser "High-performance Cr/Sc multilayers for the soft x-ray range", Proc. SPIE 5963, Advances in Optical Thin Films II, 59631T (5 October 2005); https://doi.org/10.1117/12.624868

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