Monolithic single mode SU-8 waveguides for integrated optics

Maria Nordström; Dan A. Zauner; Anja Boisen; Jörg Hübner

doi:10.1117/12.644514

23 January 2006 Monolithic single mode SU-8 waveguides for integrated optics

Maria Nordström, Dan A. Zauner, Anja Boisen, Jörg Hübner

Proceedings Volume 6112, Microfluidics, BioMEMS, and Medical Microsystems IV; 611206 (2006) https://doi.org/10.1117/12.644514
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

We present the fabrication and characterization of single mode waveguides fabricated monolithically in SU-8. SU-8 is a negative resist, which can be structured by UV lithography followed by a baking step to induce cross-linking. As a material platform, SU-8 is well suited for systems used for biochemical analysis, as it possesses very high chemical resistance and good mechanical stability. Here we show that single mode embedded waveguides can be fabricated using SU-8 as core material and the modified SU-8, mr-L 6050XP, as cladding material. The refractive index difference between the two materials of the final waveguides is around 0.004. All waveguides fabricated in this work have a height of 4.5 μm and their widths are 3, 5 or 10 μm. We have characterized the losses of these waveguides with the cut-back method both at 635 nm and 1535 nm. We have furthermore studied changes in the refractive index of the material with changes in the processing of the SU-8 material. Finally, absorption measurements in the visible spectral range and mode profile analysis have also been performed. Because of the low optical absorption at wavelengths above 700 nm in combination with the fast, simple and cost-efficient fabrication process, we show that SU-8 is well suited as structuring material for waveguides for integrated optics.

Citation Download Citation

Maria Nordström, Dan A. Zauner, Anja Boisen, and Jörg Hübner "Monolithic single mode SU-8 waveguides for integrated optics", Proc. SPIE 6112, Microfluidics, BioMEMS, and Medical Microsystems IV, 611206 (23 January 2006); https://doi.org/10.1117/12.644514

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available