Characterizing nanoimprint pattern cross-section and fidelity from x-ray reflectivity

Hae-Jeong Lee; Christopher L. Soles; Hyun Wook Ro; D. R. Hines; Ronald L. Jones; Eric K. Lin; Alamgir Karim; Wen-li Wu

doi:10.1117/12.656826

23 March 2006 Characterizing nanoimprint pattern cross-section and fidelity from x-ray reflectivity

Hae-Jeong Lee, Christopher L. Soles, Hyun Wook Ro, D. R. Hines, Ronald L. Jones, Eric K. Lin, Alamgir Karim, Wen-li Wu

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61510N (2006) https://doi.org/10.1117/12.656826
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

To address several of the challenges associated with nanoimprint lithography, new measurement techniques that can correlate the physical structure of an imprinted nanostructure with the materials used and the imprinting conditions are critical for optimizing imprint processes. Specular X-ray reflectivity (SXR) is a widely used technique to quantify the thickness, density, and roughness of the non-patterned films. Here we extend the applicability of SXR to imprinted nanostructures by characterizing the pattern height, the line-to-space ratio as a function of pattern height, the residual layer thickness, and the fidelity of pattern transfer.

Citation Download Citation

Hae-Jeong Lee, Christopher L. Soles, Hyun Wook Ro, D. R. Hines, Ronald L. Jones, Eric K. Lin, Alamgir Karim, and Wen-li Wu "Characterizing nanoimprint pattern cross-section and fidelity from x-ray reflectivity", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61510N (23 March 2006); https://doi.org/10.1117/12.656826

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available