CMOS chip chemical detection system comprising mass-sensitive nanocantilevers

Ashok Srivastava; Rajiv Soundararajan; Jui-Ching Hsu

doi:10.1117/12.659063

31 March 2006 CMOS chip chemical detection system comprising mass-sensitive nanocantilevers

Ashok Srivastava, Rajiv Soundararajan, Jui-Ching Hsu

Proceedings Volume 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; 61720Y (2006) https://doi.org/10.1117/12.659063
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

An attempt has been made to design a CMOS single-chip chemical detection system for integrating nanocantilevers with low power readout electronic circuits for the detection of traces (few molecules) of hydrocarbon-based gases in the environment. The design is divided into two following building blocks: nanocantilevers as chemical sensors and readout electronics. Carbon nanotubes (CNT)-based cantilevers have been chosen for high-sensitivity chemical sensing for on-chip integration with the interface electronics. An experimental technique is presented for the fabrication of CNT cantilever beams. Design of a readout interface electronics using a switched capacitor technique is presented in 0.5 μm n-well CMOS process for integrating CNT cantilever sensors.

Citation Download Citation

Ashok Srivastava, Rajiv Soundararajan, and Jui-Ching Hsu "CMOS chip chemical detection system comprising mass-sensitive nanocantilevers", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61720Y (31 March 2006); https://doi.org/10.1117/12.659063

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available