Quality measures for depth-from-focus approaches

Susanne Töpfer; Uwe Nehse; Gerhard Lin

doi:10.1117/12.675646

18 April 2006 Quality measures for depth-from-focus approaches

Susanne Töpfer, Uwe Nehse, Gerhard Lin

Proceedings Volume 6180, Photonics, Devices, and Systems III; 61800A (2006) https://doi.org/10.1117/12.675646
Event: Photonics, Devices, and Systems III, 2005, Prague, Czech Republic

Abstract

Besides the ongoing rapid development of processing power of computers new standardised interfaces are emerging. Thus, future measuring software will be able to process information of the quality of a measuring operation. This exceeds the current state-of-the-art. The originality of this research lies with the proposal of a novel method for computing a quality factor for each measuring point. The method is applicable for optical imaging sensors. However, similar regimes may be applied for other types of sensors. This paper presents a general methodology for computing a quality factor for focusing. Thereby different criteria such as unimodality, accuracy, reproducibility, definition range, general applicability and robustness are covered. The application of the proposed quality factor enables a more profound evaluation of a focusing process than the pure specification of the uncertainty of the focus position does. Within a closed quality loop it enables a higher level of control of the measuring process resulting in a significantly decreased measuring uncertainty and an increased robustness. Thereby the closed quality loop comprises the CAD process, inspection planning, measuring operations and the comparison between CAD data and measured geometry. The paper closes with some experimental results showing the soundness of the proposed method.

Citation Download Citation

Susanne Töpfer, Uwe Nehse, and Gerhard Lin "Quality measures for depth-from-focus approaches", Proc. SPIE 6180, Photonics, Devices, and Systems III, 61800A (18 April 2006); https://doi.org/10.1117/12.675646

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